Stability of surface tension self-assembled 3D MOEMS

The thermal and mechanical stability of self-assembled MOEMS components consisting of 3D mirrors have been evaluated. The thermal–mechanical constants of the hinge material (AZ4562 photoresist) used to power the surface tension self-assembly process have been measured and used to predict the stability of assemblies. The Young’s moduli and thermal expansion coefficients showed constant values of average 6.78× 109 N/m2 and 4.08× 10−6 ◦C−1 under various thermal conditions. The angle variation of all the components tested under thermal cycling was less than 0.006◦ ◦C−1 up to 110 ◦C. The use of mechanical limiters enhanced the thermal stability to near 0 up to 150 ◦C. During dynamic mechanical stability measurement, for a maximum external acceleration of >50 g, no device failure was observed. ©